Chemical
Si Source
HCDS
Hexachloro Disilane Si2Cl6 268.88 g/mol 144°C 1.56 Colorless liquid
TEOS
Tetra-ethoxy Stane
Si[O(C2H5)]4
208.33 g/mol
169°C
0.92
colorless liquid
TDMAS
Tetrakis(dimethylamino) Silane
Si[N(CH3)2)]4
204.39 g/mol
190°C
0.91
Colorless liquid
TEMASi
Tetrakis(ethylmethylamino) Silane
Si[N(CH3)(C2H)5)]4
260.55 g/mol
40°C/0.2torr
0.89
Colorless liquid
Ti Source
TiCl4
Tetrachloro Titanium
TiCl4
189.71 g/mol
136°C
1.73
Colorless liquid
TEMAT
Tetrakis(ethylmethylamino) Titanium
Ti[N(CH3)(C2H)5)]4
280.32 g/mol
80°C/0.1torr
0.92g
Pale yellowish liquid
TDMAT
Tetrakis(dimethylamino) Titanium
Ti[N(CH3)2]4
224.28 g/mol
50°C/0.5torr
0.95g
yellowish liquid
Zr Source
CpZr
Ethylcyclopentadienyl Tris(ethylmethylamino) Zirconium
((C2H5)C5H4)Zr[N(CH3)C2H5]3
358.68 g/mol
Yellow Liquid
TEMAZr
Tetrakis(ethylmethylamino) Zirconium
Zr[N(CH3)(C2H)5)]4
323.68 g/mol
81°C/0.1torr
1.05g
Colorless to pale yellow liquid
Hf Source
Cp-Hf
Ethylcyclopentadienyl Tris(ethylmethylamino) Hafnium
((C2H5C5H4)Hf[N(CH3)C2H5]3
445.95 g/mol
110°C/0.2torr
1.38g
Yellow liquid
TEMAHf
Tetrakis(ethylmethylamino) Hafnium
Hf[N(CH3)C2H5)]4
410.95 g/mol
79°C/0.1torr
1.32
Pale yellow liquid
Other Source
TMA
Trimethyl Aluminum
(CH3)3Al
72.09 g/mol
125°C
0.75
Colorless liquid
DEZ
Diethyl Zinc
Zn(C2H5)2
132.51 g/mol
117°C
1.21
Colorless liquid
PET
Pentaetoxy Titanium
Ta(OC2H5)5
406.5 g/mol
115°C
1.56
Colorless liquid