PVD

  • Varian XM-90
  • Varian-3000
  • Varian-M2000
  • Varian-M2i
  • Varian-MB2
  • Endura
  • Fronos

More info

CVD

  • Concept-One
  • Concept 2 Sequel
  • Concept 2 Altus
  • Concept 2 Speed
  • Ultima

More info

Etcher

  • E-MAX
  • Centura DPS

More info

Asher/CMP

Asher

  • L3510
  • PEP3510

CMP

  • EBARA EPO222
  • Mira Mesa

More info

Chemical

Battery

  • FPD Equipments
  • Cell Equipments

More info

Si Source

HCDS 

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Hexachloro Disilane
    Si2Cl6
    268.88 g/mol
    144°C
    1.56
    Colorless liquid


    TEOS

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Density :
  • Phase at 25°C :

    • Tetra-ethoxy Stane
    Si[O(C2H5)]4
    208.33 g/mol
    169°C
    0.92
    colorless liquid


    TDMAS

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Tetrakis(dimethylamino) Silane
    Si[N(CH3)2)]4
    204.39 g/mol
    190°C
    0.91
    Colorless liquid


    TEMASi

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Tetrakis(ethylmethylamino) Silane
    Si[N(CH3)(C2H)5)]4
    260.55 g/mol
    40°C/0.2torr
    0.89
    Colorless liquid

    Ti Source

    TiCl4

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Tetrachloro Titanium
    TiCl4
    189.71 g/mol
    136°C
    1.73
    Colorless liquid


    TEMAT

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Tetrakis(ethylmethylamino) Titanium
    Ti[N(CH3)(C2H)5)]4
    280.32 g/mol
    80°C/0.1torr
    0.92g
    Pale yellowish liquid


    TDMAT

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Tetrakis(dimethylamino) Titanium
    Ti[N(CH3)2]4
    224.28 g/mol
    50°C/0.5torr
    0.95g
    yellowish liquid

    Zr Source


    CpZr

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Phase at 25°C :

    • Ethylcyclopentadienyl Tris(ethylmethylamino) Zirconium
    ((C2H5)C5H4)Zr[N(CH3)C2H5]3
    358.68 g/mol
    Yellow Liquid


    TEMAZr

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Tetrakis(ethylmethylamino) Zirconium
    Zr[N(CH3)(C2H)5)]4
    323.68 g/mol
    81°C/0.1torr
    1.05g
    Colorless to pale yellow liquid

    Hf Source

    Cp-Hf

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Ethylcyclopentadienyl Tris(ethylmethylamino) Hafnium
    ((C2H5C5H4)Hf[N(CH3)C2H5]3
    445.95 g/mol
    110°C/0.2torr
    1.38g
    Yellow liquid


    TEMAHf

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Tetrakis(ethylmethylamino) Hafnium
    Hf[N(CH3)C2H5)]4
    410.95 g/mol
    79°C/0.1torr
    1.32
    Pale yellow liquid

    Other Source

    TMA

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Trimethyl Aluminum
    (CH3)3Al
    72.09 g/mol
    125°C
    0.75
    Colorless liquid

    DEZ

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Diethyl Zinc
    Zn(C2H5)2
    132.51 g/mol
    117°C
    1.21
    Colorless liquid


    PET

  • Chemical Name :
  • Formula :
  • Molecular Weight :
  • Boiling Point :
  • Density :
  • Phase at 25°C :

    • Pentaetoxy Titanium
    Ta(OC2H5)5
    406.5 g/mol
    115°C
    1.56
    Colorless liquid